Laser-MBE system belongs to the third generation high-throughput combinatorial film preparation system. Basically, this system sputters target material composition to the substrate in the use of high-energy pulsed laser during the epitaxial growth. The adoption of movable masks makes continuous-gradient-component thin film possible, which greatly improves the efficiency of thin film growth and benefits exploration and study of the physical properties of new materials.

Specific principles as follows: The use of a movable mask let the deposition of component A distribute gradiently on the substrate surface. Then we do the same for component B but in the opposite direction. Finally we get uniform thin film whose components varying from A to B gradiently.