Copyright IOP SC02 2015-2016
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When the target is bombarded by high-energy particle, the atoms absorb enough energy to eject and eventually deposited as the thin film grown on the substrate. In the magnetron sputtering process, electrons collide with argon molecule and produce argon ions. Argon ions accelerated by the electric field hit the target and result in sputtering, which lead that the secondary electrons carry out circular motion in the form of cycloid under the electric and magnetic fields on the target surface. Bound electrons have a longer trajectory, thereby increasing the probability of electron ionization of argon gas.

Device name: Combi Laser MBE-STM
Development cycle: 01/2015-12/2016
Function: Realize the synthesis and characterization of thin film with continuous gradient component.
Features: Combi Laser MBE-STM is a combination of LMBE chamber, STM chamber, hub, prepared chamber and rapid injection chamber. The degree of vacuum can reach 10-10torr. Moreover, RHEED is used to monitor the thin film growth in time to ensure the layerd growth. The lowest temperature reached is 2K.

Laser-MBE system belongs to the third generation high-throughput combinatorial film preparation system. Basically, this system sputters target material composition to the substrate in the use of high-energy pulsed laser during the epitaxial growth. The adoption of movable masks makes continuous-gradient-component thin film possible, which greatly improves the efficiency of thin film growth and benefits exploration and study of the physical properties of new materials.

Specific principles as follows: The use of a movable mask let the deposition of component A distribute gradiently on the substrate surface. Then we do the same for component B but in the opposite direction. Finally we get uniform thin film whose components varying from A to B gradiently.

High-throughput LMBE
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Pulse Laser Deposition
Magnetron Sputtering System
In situ thin film growth and characteration system(Building)

PLD consists of pulsed lasers, optical lenses, deposition systems and other components. The working principle: when the laser pulse is absorbed by the target, energy is first converted to electronic excitation and then into thermal, chemical and mechanical energy resulting in evaporation, ablation, plasma formation and even exfoliation. The ejected species expand into the surrounding vacuum in the form of a plume containing many energetic species including atoms, molecules, electrons, ions, clusters, particulates and molten globules, before depositing on the typically hot substrate.